SEMI · Wafer Inspection
Spectra-2000A
Wafer-level 2D optical inspection equipment
High-resolution imaging to accurately identify tiny defects
Automatically identify patterns, etching and appearance abnormalities on the wafer surface through multi-magnification microscopic imaging and AI algorithms
Get product brochure
Please complete the form. Our marketing team will contact you to discuss your requirements.
Product Positioning
Spectra-2000A is a high-resolution 2D optical inspection equipment for wafer surface appearance inspection, suitable for wafer manufacturing and packaging front-end processes
The equipment realizes automatic detection, classification and recording of small defects through automatic focusing, wafer posture correction and AI defect recognition.
Help customers improve process control levels and product yields
Core Advantages
High-resolution microscopy imaging
Revealing fine structures and low-contrast anomalies on the wafer surface
Flexible switching of multiple magnifications
Taking into account both large-scale scanning and local high-power review
AI-Powered Defect Recognition
Automatic identification of irregular appearance defects
Autofocus and Calibration
Improve imaging stability and reduce manual intervention
Applications
stain
scratch
Bump scratch
Collapse
PI hole
Many needle marks
peeling
Pad color difference
Pad defect
Pad stained
Key Specifications
Inspection Type
2D high-resolution appearance inspection
Detectable Defects
Graphic and etching abnormalities, foreign matter, dirt, edge chipping, missing edges, damage, scratches and cutting damage, etc.